The GM50A is a general purpose, metal sealed MFC well suited for a wide variety of applications requiring flow control capability from 5 sccm to 50 slm FS, N₂ equivalent. It incorporates the latest in digital flow control electronics along with a well proven, patented thermal sensor and mechanical design. The GM50A digitally controlled MFC is available with either analog or digital I/O, utilizing MKS control algorithms for fast and repeatable response (500 milliseconds typical). It offers a digital calibration for 1% of setpoint accuracy on the calibration gas and is compatible with 1479A MFCs. The GM50A uses a standard 3-inch footprint for flow rates from 5 sccm to 50 slm, and its electropolished surface finish makes it suitable for high purity process applications. An MFM version is also available without electropolishing.
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Technical Specifications
MKS Instruments GM50A technical specifications.
General
Full Scale Flow Ranges
5 - 50000sccm N₂ equivalent
Maximum Inlet Pressure
150psig
Normal Operating Pressure Differential (5 to 5000 sccm)
10 to 40psid
Normal Operating Pressure Differential (10000 to 20000 sccm)
15 to 40psid
Normal Operating Pressure Differential (30000 to 50000 sccm)
25 to 40psid
Proof Pressure
1000psig
Burst Pressure
1500psig
Control Range
2% to 100%of F.S.
Typical Accuracy (20 to 100% F.S. N₂ calibration gas)
± 1%of setpoint
Typical Accuracy (2 to 20% F.S. N₂ calibration gas)
± 0.2%of F.S.
Repeatability
± 0.3%of Reading
Resolution
0.1%of Full Scale
Temperature Coefficient (Zero)
< 0.05%of F.S./°C
Temperature Coefficient (Span)
< 0.08%of Rdg./°C
Inlet Pressure Coefficient
< 0.02%of Rdg./psi
Typical Controller Settling Time
< 750msec.
Warm-up Time
< 30min
Operating Temperature Range (Ambient)
10 to 50°C
Storage Humidity
0 to 95%Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
Fittings
Swagelok® 4 VCR® or ¼" Swagelok compression seal
Leak Integrity (External)
< 1 x 10⁻¹⁰scc/sec He
Leak Integrity (Through closed valve)
< 1.0%of F.S. at 40 psig inlet to atmosphere
Wetted Materials (Standard)
316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, Nickel
Wetted Materials (Valve Seat)
Teflon®
Surface Finish (MFC)
10µ inch average Ra(electropolished)
Surface Finish (MFM)
16µ inch average Ra
Weight
less than 3 lbs (1.4kg)
Input Power Required (Analog)
+15 to +24 VDC@ (< 4 watts)
Flow Input/Output Signal (Voltage)
0 to 5 VDC
Voltage Connector
15 pin Type "D" male, 9 pin Type "D" male
Flow Input/Output Signal (Current)
4 to 20 mA
Current Connector
15 pin Type "D" male
Digital I/O Input Power Required (DeviceNet)
+11 to +25 VDC(< 4 watts)
Digital I/O Connector (DeviceNet)
5 pin microconnector
Digital I/O Data Rate Switch/Selection (DeviceNet)
4 positions: 125, 250, 500K (Default), PGM
Digital I/O Data Rate (User Selectable DeviceNet)
125 Kbps, 250 Kbps, 500 Kbps
Digital I/O MAC ID Switches/Addresses (DeviceNet)
2 switches, 10 positions; 0,0 to 6,3; 1 to 254
Digital I/O Network Size (DeviceNet)
Up to 64nodes
Digital I/O Network Topology (DeviceNet)
Linear (trunkline/dropline)
Digital I/O Input Power Required (RS-485)
+15 to +24 VDC(< 4 watts)
Digital I/O Connector (RS-485)
9 pin Type D male
Digital I/O Data Rate Switch/Selection (RS-485)
No switch, Set Data Rate via RS485
Digital I/O Data Rate (User Selectable RS-485)
9.6 Kbps, 19.2 Kbps, 38.4 Kbps
Digital I/O Station Addresses (RS-485)
0,0 to 9,9
Digital I/O Network Size (RS-485)
Up to 32nodes
Digital I/O Network Topology (RS-485)
Master/slave
Digital I/O Input Power Required (Profibus)
+15 to +24 VDC(< 4 watts)
Digital I/O Connector (Profibus)
9 pin Type D male (power) and 9 pin Type D female (comm.)
Digital I/O Data Rate Switch/Selection (Profibus)
No switch, Set Data Rate via Profibus
Digital I/O Data Rate (User Selectable Profibus)
9.6 Kbps to 12 Mbps
Digital I/O MAC ID Switches/Addresses (Profibus)
2 switches, 10 positions
Digital I/O Network Size (Profibus)
Up to 99nodes
Digital I/O Network Topology (Profibus)
Master/slave
Gas Standard
SEMI Standard E52-0703
Patented Thermal Sensor Design
Exceptional zero stability
Embedded User Interface
Ability to change device range and user gas, monitor functionality and collect performance data
Compliance
Ce Mark
Compliant
RoHS
Compliant
Emc Directive
2004/108/EC
Patent
US Patent No 5461913
Datasheet
MKS Instruments GM50A Datasheet
Download the complete datasheet for MKS Instruments GM50A to view detailed technical specifications.
This datasheet cannot be embedded due to technical restrictions.