The GM50A is a general purpose, metal sealed MFC well suited for a wide variety of applications requiring flow control capability from 5 sccm to 50 slm FS, N₂ equivalent. It incorporates the latest in digital flow control electronics along with a well proven, patented thermal sensor and mechanical design. The GM50A digitally controlled MFC is available with either analog or digital I/O, utilizing MKS control algorithms for fast and repeatable response (500 milliseconds typical). It offers a digital calibration for 1% of setpoint accuracy on the calibration gas and is compatible with 1479A MFCs. The GM50A uses a standard 3-inch footprint for flow rates from 5 sccm to 50 slm, and its electropolished surface finish makes it suitable for high purity process applications. An MFM version is also available without electropolishing.
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Technical Specifications
MKS Instruments GM50A technical specifications.
General
| Full Scale Flow Ranges | 5 - 50000sccm N₂ equivalent |
| Maximum Inlet Pressure | 150psig |
| Normal Operating Pressure Differential (5 to 5000 sccm) | 10 to 40psid |
| Normal Operating Pressure Differential (10000 to 20000 sccm) | 15 to 40psid |
| Normal Operating Pressure Differential (30000 to 50000 sccm) | 25 to 40psid |
| Proof Pressure | 1000psig |
| Burst Pressure | 1500psig |
| Control Range | 2% to 100%of F.S. |
| Typical Accuracy (20 to 100% F.S. N₂ calibration gas) | ± 1%of setpoint |
| Typical Accuracy (2 to 20% F.S. N₂ calibration gas) | ± 0.2%of F.S. |
| Repeatability | ± 0.3%of Reading |
| Resolution | 0.1%of Full Scale |
| Temperature Coefficient (Zero) | < 0.05%of F.S./°C |
| Temperature Coefficient (Span) | < 0.08%of Rdg./°C |
| Inlet Pressure Coefficient | < 0.02%of Rdg./psi |
| Typical Controller Settling Time | < 750msec. |
| Warm-up Time | < 30min |
| Operating Temperature Range (Ambient) | 10 to 50°C |
| Storage Humidity | 0 to 95%Relative Humidity, non-condensing |
| Storage Temperature | -20° to 80°C |
| Fittings | Swagelok® 4 VCR® or ¼" Swagelok compression seal |
| Leak Integrity (External) | < 1 x 10⁻¹⁰scc/sec He |
| Leak Integrity (Through closed valve) | < 1.0%of F.S. at 40 psig inlet to atmosphere |
| Wetted Materials (Standard) | 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, Nickel |
| Wetted Materials (Valve Seat) | Teflon® |
| Surface Finish (MFC) | 10µ inch average Ra(electropolished) |
| Surface Finish (MFM) | 16µ inch average Ra |
| Weight | less than 3 lbs (1.4kg) |
| Input Power Required (Analog) | +15 to +24 VDC@ (< 4 watts) |
| Flow Input/Output Signal (Voltage) | 0 to 5 VDC |
| Voltage Connector | 15 pin Type "D" male, 9 pin Type "D" male |
| Flow Input/Output Signal (Current) | 4 to 20 mA |
| Current Connector | 15 pin Type "D" male |
| Digital I/O Input Power Required (DeviceNet) | +11 to +25 VDC(< 4 watts) |
| Digital I/O Connector (DeviceNet) | 5 pin microconnector |
| Digital I/O Data Rate Switch/Selection (DeviceNet) | 4 positions: 125, 250, 500K (Default), PGM |
| Digital I/O Data Rate (User Selectable DeviceNet) | 125 Kbps, 250 Kbps, 500 Kbps |
| Digital I/O MAC ID Switches/Addresses (DeviceNet) | 2 switches, 10 positions; 0,0 to 6,3; 1 to 254 |
| Digital I/O Network Size (DeviceNet) | Up to 64nodes |
| Digital I/O Network Topology (DeviceNet) | Linear (trunkline/dropline) |
| Digital I/O Input Power Required (RS-485) | +15 to +24 VDC(< 4 watts) |
| Digital I/O Connector (RS-485) | 9 pin Type D male |
| Digital I/O Data Rate Switch/Selection (RS-485) | No switch, Set Data Rate via RS485 |
| Digital I/O Data Rate (User Selectable RS-485) | 9.6 Kbps, 19.2 Kbps, 38.4 Kbps |
| Digital I/O Station Addresses (RS-485) | 0,0 to 9,9 |
| Digital I/O Network Size (RS-485) | Up to 32nodes |
| Digital I/O Network Topology (RS-485) | Master/slave |
| Digital I/O Input Power Required (Profibus) | +15 to +24 VDC(< 4 watts) |
| Digital I/O Connector (Profibus) | 9 pin Type D male (power) and 9 pin Type D female (comm.) |
| Digital I/O Data Rate Switch/Selection (Profibus) | No switch, Set Data Rate via Profibus |
| Digital I/O Data Rate (User Selectable Profibus) | 9.6 Kbps to 12 Mbps |
| Digital I/O MAC ID Switches/Addresses (Profibus) | 2 switches, 10 positions |
| Digital I/O Network Size (Profibus) | Up to 99nodes |
| Digital I/O Network Topology (Profibus) | Master/slave |
| Gas Standard | SEMI Standard E52-0703 |
| Patented Thermal Sensor Design | Exceptional zero stability |
| Embedded User Interface | Ability to change device range and user gas, monitor functionality and collect performance data |
Compliance
| Ce Mark | Compliant |
| RoHS | Compliant |
| Emc Directive | 2004/108/EC |
| Patent | US Patent No 5461913 |
Datasheet
MKS Instruments GM50A Datasheet
Download the complete datasheet for MKS Instruments GM50A to view detailed technical specifications.
This datasheet cannot be embedded due to technical restrictions.