Renesas FS1012-1001-LQ technical specifications.
| Sensor Type | Mass |
| Medium | Liquid |
| Flow Range | 0SLPM to 0.5SLPM |
| Min Operating Temperature | 0°C |
| Max Operating Temperature | 85°C |
| Max Operating Supply Voltage | 5V |
| Min Operating Supply Voltage | 3V |
| Typical Operating Supply Voltage | 3.3V |
| Pin Count | 6 |
| RoHS | Yes |
| RoHS Version | 2011/65/EU, 2015/863 |
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