The SFC5500-0.5slm is a versatile mass flow controller based on CMOSens® MEMS technology. It features a microthermal measurement principle that offers high accuracy and repeatability without long-term drift. The device is factory-calibrated for multiple gases including Air, N2, O2, H2, He, CH4, N2O, Ar, and CO2, and features a wide control range from less than 0.1% to 100% of full scale.
Voltage14 - 26.4VDC
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Technical Specifications
Sensirion SFC5500-0.5slm technical specifications.
General
| Full Scale Flow Rate | 0.5slm |
| Accuracy | 0.8% SP |
| Repeatability | 0.1% SP |
| Settling Time | <100ms |
| Max Operating Pressure | 5bar |
| Supply Voltage | 14 - 26.4VDC |
| Max Supply Current | 120000uA |
| Interfaces | RS485, DeviceNet |
| Size (LxWxH) | 115 x 24.6 x 91mm |
| MTBF | 169years |
Compliance
| Nist Traceable | Yes |
| RoHS | Compliant |
Datasheet
Sensirion SFC5500-0.5slm Datasheet
Download the complete datasheet for Sensirion SFC5500-0.5slm to view detailed technical specifications.
This datasheet cannot be embedded due to technical restrictions.