SFC5500-10SLM

The SFC5500-10SLM is a versatile digital mass flow controller based on the CMOSens® MEMS technology. It features a microthermal measurement principle that provides high accuracy and repeatability without the need for in-field recalibration. The device is factory-calibrated for multiple gases including Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O. It offers an ultra-fast settling time of less than 100 ms and a high dynamic control range.