The 925 Transducer offers a wide measurement range from 1x10-5 Torr to atmosphere that is based on measurement of thermal conductivity. The MicroPirani sensor consists of a silicon chip with a heated resistive element forming one surface of a cavity. A cover on top of the chip forms the other surface of the cavity. Due to the geometry of the sensor, convection cannot take place within the cavity and consequently, the sensor is insensitive to the mounting position. Gas molecules are passed by diffusion only to the heated element where the heat loss of the gas is measured.
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Technical Specifications
MKS Instruments 925-81010 technical specifications.
General
| Digital Communication | RS485/RS232 (4800 to 230400 Baud) |
| Analog Output Resolution | 16 bit |
| Sensor | MicroPirani™ (MEMS Thermal Conductivity) |
| Relay Contact Rating | 1 A @ 30VAC/DC, resistive |
| Relays | 3 relays SPDT(Optional) |
| Relay Response | <100 msec maximum |
| Power Requirements | 9 to 30 VDC, < 1.5 watts max |
Compliance
| RoHS Version | 2011/65/EU |
Datasheet
MKS Instruments 925-81010 Datasheet
Download the complete datasheet for MKS Instruments 925-81010 to view detailed technical specifications.
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