MKS Instruments
GE50A110503R6V010
Mass Flow Controller for Sulfur Hexafluoride, 11-25V, 10-50°C, VCR Male
The GE50A110503R6V010 mass flow controller from MKS Instruments is designed for use with sulfur hexafluoride media. It features a stainless steel media path and operates over a temperature range of 10 to 50°C. The device is powered by a supply voltage between 11 and 25 volts and includes a display option for user interface. The flow controller is constructed with a product size of 123.95mm in length, 36.8mm in width, and 143.2mm in height, with a maximum weight of 1400 grams. It is rated for typical proof and burst pressures of 1000 and 1500 psig, respectively.
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Technical Specifications
MKS Instruments GE50A110503R6V010 technical specifications.
General
| Product Length (mm) | 123.95 |
| Product Width (mm) | 36.8 |
| Product Height (mm) | 143.2 |
| Product Weight (g) | <1400 |
| Type | Mass Flow Controller |
| Media | Sulfur Hexafluoride |
| Typical Proof Pressure | 1000psig |
| Typical Burst Pressure | 1500psig |
| Media Path Material | Stainless Steel |
| Operating Supply Voltage Range | 11 to 25VDC |
| Repeatability | ±0.3% |
| Display Option | Yes |
| Min Operating Temperature | 10°C |
| Max Operating Temperature | 50°C |
| Connection Type | VCR Male |
Compliance
| Cage Code | 23582 |
| EU RoHS | Yes |
| Schedule B | 9026105000 |
| ECCN | EAR99 |
| Automotive | No |
| AEC Qualified | No |
| PPAP | No |
| RoHS Versions | 2002/95/EC |
Datasheet
MKS Instruments GE50A110503R6V010 Datasheet
Download the complete datasheet for MKS Instruments GE50A110503R6V010 to view detailed technical specifications.
This datasheet cannot be embedded due to technical restrictions.