GM50A013504S63010

The GM50A is a general purpose, metal sealed MFC well suited for a wide variety of applications requiring flow control capability from 5 sccm to 50 slm FS, N₂ equivalent. The GM50A incorporates the latest in digital flow control electronics along with a well proven, patented thermal sensor and mechanical design. The digitally controlled MFC is available with either analog or digital I/O. Its digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to setpoint throughout the device control range, with typical response times on the order of 500 milliseconds. A digital calibration yields 1% of setpoint accuracy on the calibration gas. The analog and digital I/O can easily be used to replace those same I/O types of the 1479A MFCs. The GM50A utilizes the standard 3-inch footprint and is metal sealed with an electropolished surface finish, making it well suited for use in high purity process applications. An MFM version (not electropolished) is also available.