MKS Instruments P9B110104F5P0AA technical specifications.
| Product Length (mm) | 104.9 |
| Product Width (mm) | 28.58 |
| Product Height (mm) | 127 |
| Product Weight (g) | <1400 |
| Type | Mass Flow Controller |
| Media | Sulfur Hexafluoride |
| Typical Proof Pressure | 1000psig |
| Typical Burst Pressure | 1500psig |
| Media Path Material | Stainless Steel |
| Operating Supply Voltage Range | 24(Typ)VDC |
| Repeatability | ±0.3% |
| Display Option | Yes |
| Min Operating Temperature | 10°C |
| Max Operating Temperature | 50°C |
| Connection Type | W-Seal |
| Connection Size | 1.5in |
| Cage Code | 23582 |
| Schedule B | 9026105000 |
| ECCN | EAR99 |
| Automotive | No |
| AEC Qualified | No |
| PPAP | No |
| RoHS Versions | 2002/95/EC |
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