The FS1012-1002-LQ is a mass flow sensor designed for liquid applications, with a flow range of 0 to 1 SLPM. It operates within a temperature range of 0 to 85 degrees Celsius, and can be supplied with a voltage between 3 and 5 volts. The sensor has a 6-pin package.
Renesas FS1012-1002-LQ technical specifications.
| Sensor Type | Mass |
| Medium | Liquid |
| Flow Range | 0SLPM to 1SLPM |
| Min Operating Temperature | 0°C |
| Max Operating Temperature | 85°C |
| Max Operating Supply Voltage | 5V |
| Min Operating Supply Voltage | 3V |
| Typical Operating Supply Voltage | 3.3V |
| Pin Count | 6 |
| RoHS | Yes |
| RoHS Version | 2011/65/EU, 2015/863 |
No datasheet is available for this part.